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MODEL FCC-3000-G1 FCC-3000-G2 FCM-3000-G1 FCM-3000-G2
Mounting MFC/MFM 3660 (MFC) 3200 (MFC) 3760 (MFM) 3100 (MFM)
Standard flow range
(at N2 calibration condition)
10SCCM-20SLM 1SCCM-20SLM 10SCCM-20SLM 1SCCM-20SLM
Sealing material FKM (option CR or NBR)
Response Within 2 sec. (F.S. ±2%) Within 1 sec. (F.S. ±2%) Within 2 sec. Within 1 sec.
Joint Various joints are applicable.