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Flow range (N2 equivalent, 20℃/1 atm) 50 SLM
Sensor Thermal mass flow sensor
Response 7 sec. or less
Accuracy ≥25 SLM ±2% RD < 25 SLM ±3% F.S. (20℃)
Repeatability ±0.5% F.S.
Proof pressure 980 kPa (G)
Allowable ambient temperature 5–45℃
Allowable ambient humidity 10–90% (No condensation allowed)
Materials of parts in contact with gases Body: SUS303, PTFE
Sealing: FKM (option: CR or NBR)
Electric connection 171826-5 (made by AMP)
Flow rate output signals 0–5 VDC (Allowable external load resistance:
250 kΩ or more)
Required power supply ±15 VDC ±5%, 60 mA
Joint (Main unit bore) Rc 1/4
Weight Approx. 500 g