
High-grade Mass Flow Meter MODEL 3100 - Kofloc Vietnam
Nhà cung cấp: ANS Vietnam
Flow range (at N2 calibration conditions) | 10SCCM-20SLM |
Response | 1 sec. or less to within ±2% of full scale of final value typical for 0-100% response |
Accuracy | Within ±1.0% F.S./3100 |
Linearity | Within ±0.5% F.S. |
Repeatability | Within ±0.2% F.S. |
Proof pressure | 980kPa |
Leak rate | 1x10-8 Pa·m3/s or less (excluding transmission of He) |
Working temperature range | 0-50℃ (Accuracy guarantee: 15-35℃) |
Materials of parts exposed to gases | Body: SUS 316L, SUS 316, PTFE Seals: Viton® (Optional: Neoprene®) |
Joint | Standard: 1/4SWL® |
Optional: 1/8SWL® 1/4VCR® RC1/4®, etc. | |
Electrical connections | Dsub 9-pin male connector per KFC standard (SEMI standard) |
Flow rate output signals | 0-5VDC |
Required power supply* | +15VDC (±5%) 100mA, –15VDC (±5%) 100mA |