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Flow range (at N2 calibration conditions) 10SCCM-20SLM
Response 1 sec. or less to within ±2% of full scale of
final value typical for 0-100% response
Accuracy Within ±1.0% F.S./3100
Linearity Within ±0.5% F.S.
Repeatability Within ±0.2% F.S.
Proof pressure 980kPa
Leak rate 1x10-8 Pa·m3/s or less (excluding transmission of He)
Working temperature range 0-50℃ (Accuracy guarantee: 15-35℃)
Materials of parts exposed to gases Body: SUS 316L, SUS 316, PTFE
Seals: Viton® (Optional: Neoprene®)
Joint Standard: 1/4SWL®
Optional: 1/8SWL® 1/4VCR® RC1/4®, etc.
Electrical connections Dsub 9-pin male connector per KFC standard
(SEMI standard)
Flow rate output signals 0-5VDC
Required power supply* +15VDC (±5%) 100mA, –15VDC (±5%) 100mA