
Mass Flow Sensor MODEL3810S - Kofloc Vietnam
Nhà cung cấp: ANS Vietnam
Flow range (N2 equivalent, 20℃/1 atm) |
10 SCCM–2 SLM (freely selectable) |
3 SLM–50 SLM (freely selectable) |
Sensor | Thermal mass flow sensor | |
Accuracy | ±2%F.S. (25℃) | ±5%F.S. (25℃) |
Temperature coefficient | ±0.15 F.S./℃ (15–35℃) | ±0.2 F.S./℃ (15–35℃) |
Repeatability | ±0.5%F.S. | |
Proof pressure | 980 kPa (G) | |
Allowable ambient temperature |
5–45℃ | |
Allowable ambient humidity |
10–90% (No condensation allowed) | |
Materials of parts in contact with gases |
Body: SUS303, PTFE | |
Sealing: FKM (option: CR or NBR) | ||
Electric connection | 171826-5 (made by AMP) | |
Flow output signal | 0–5 VDC (External load resistance: 250 kΩ or more) | |
Power supply | ±15 VDC ±5%, 60 mA | |
Joint (Main unit bore) | Rc1/4 | |
Weight | Approx. 250 g | Approx. 350 g |