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Flow range (N2
equivalent, 20℃/1 atm)
10 SCCM–2 SLM (freely
selectable)
3 SLM–50 SLM (freely
selectable)
Sensor Thermal mass flow sensor
Accuracy ±2%F.S. (25℃) ±5%F.S. (25℃)
Temperature coefficient ±0.15 F.S./℃ (15–35℃) ±0.2 F.S./℃ (15–35℃)
Repeatability ±0.5%F.S.
Proof pressure 980 kPa (G)
Allowable ambient
temperature
5–45℃
Allowable ambient
humidity
10–90% (No condensation allowed)
Materials of parts in
contact with gases
Body: SUS303, PTFE
Sealing: FKM (option: CR or NBR)
Electric connection 171826-5 (made by AMP)
Flow output signal 0–5 VDC (External load resistance: 250 kΩ or more)
Power supply ±15 VDC ±5%, 60 mA
Joint (Main unit bore) Rc1/4
Weight Approx. 250 g Approx. 350 g