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Sensor type Thermal (EX sensor)
Flow range(N2) 10 /50 /100 /500SCCM  1 /5 /10 /20SLM 50 /100 /200SLM
Applicable gases(*1) N2(Air, H2, He, Ar, O2, CO2 and C.F.) N2(Air, Ar and C.F.)
Response within 2sec
Accuracy(*2) ± 1.0%F.S. (25℃ ) ± 1.5%F.S.(25℃ )
Temperature coefficient ± 0.2%F.S./℃ (15 ~ 35℃ )  ※ 200SLM ± 0.4%F.S./℃
Repeatability ± 0.2%F.S.
Proof pressure 980 k Pa(G)
Working Temp. 5 ~ 50℃
Allowable storage temp. -10 ~ 60℃
Materials of gas contact part SUS316, SUS316L, PTFE, FKM (optional NBR,CRP)
Power connection Adaptor or Dsub 9 pin
Digital communication RS485(MODBUS protocol, RTU mode)
Required power supply (DC) 24VDC( ± 10%) 100mA
Joint 1/4F900 (standard) 3/8F900 (standard)
Needle valve (option) MODEL2412 MODEL2412D
Signal Event output 2 x NPN open collector output, integrating pulse output (Maximum rating DC30V 50mA)
Flow output(*3) ① 4 ~ 20mA   ② 0 ~ 5V   ③ 1 ~ 5V 
Weight Approx. 600g (without fittings) Approx. 700g (without fittings)
       
(*1) The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
        N2 calibration only.    
(*2) Guarantee only N2 accuracy. 
(*3) Selectable when you order.