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Sensor Thermal sensor
Flow range (N2 equivalent) 10 SCCM–20 SLM 21–100 SLM
Accuracy Within ±2% F.S. at 25℃ Within ±3% F.S. at 25℃
Operating pressure 0.0–0.5 MPa (G)
Proof pressure 1.0 MPa (G)
Allowable ambient temperature 0–50℃
Temperature coefficient ±0.2% F.S./℃ (15–35℃)
Materials of parts in
contact with gases
Body: SUS303, PTFE
Sealing: FKM
Option: Neoprene
Connection end Standard: Rc 1/4 (Ask us for other sizes.)
Power supply 24 VDC ±5%, 100 mA (option: AC adapter)
Flow output signal 1–5 V, 4–20 mA (Select when ordering.)
Event output 2 × NPN open collector output Maximum rating: 30
VDC, 50 mA