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Fluids Air,N2,O2,H2,He,Ar,CO2 (Calibration with actual gas)
For other gases, please consult us regarding conversion conditions
or calibration with the actual gas to be used.
Flow range From 0.5–5 ML/MIN to 2–20 L/MIN
(Refer to the Capacity Table on page 65.)
* Optional: 0.5–3 ML/MIN
Accuracy FS ±2% (Measurement point)
* Optional: FS ±1% (Measurement point)
Proof pressure 0.5MPa
     
     
Material SS BS
Body block SUS316 Brass
Tapered tube Pyrex®
Packing FKM * Option (1) NBR
Float Pyrex, SUS316
Protective cover Acrylic resin
Temperature resistance MAX60℃
Connection Rc 1/4 (Standard), Rc 1/8 (Optional)
* Option (1): Fluorocarbon resin, Kalrez, Perfluoro, etc.